Decontamination
Our decontamination process has been developped in the spirit to considerably reduce TCO in applications where cost intensive substrates and toolings are contaminated with environmentaly hazardous substances and coatings:
- Our process allows to remove the contaminant in a non-mechanical way and keeps the substrate in a dimensionally correct shape, with 0 variation to the original new part
- The process is applicable to the following substrate materials:
- Graphite
- Ceramics
- Metals
- CFC
Below you see a few examples of parts used in the semiconductor industry (E shower liners from Axcelis implanter), before and after decontamination:
![]() |
![]() |
Before decontamination |
After decontamination |

