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Purification ICVI coatings Decontamination

 

Decontamination

Our decontamination process has been developped in the spirit to considerably reduce TCO in applications where cost intensive substrates and toolings are contaminated with environmentaly hazardous substances and coatings:

  • Our process allows to remove the contaminant in a non-mechanical way and keeps the substrate in a dimensionally correct shape, with 0 variation to the original new part
  • The process is applicable to the following substrate materials:
       - Graphite
       - Ceramics
       - Metals
       - CFC

Below you see a few examples of parts used in the semiconductor industry (E shower liners from Axcelis implanter), before and after decontamination:

 

Before After

Before decontamination

After decontamination

 

 

 

 

Agilis Engineering S.A.

 

 

 

 

 

 

info@agilis-engineering.com  |  Tel. +352 27 12 52 86  |  Fax +352 27 12 52 87

Ecostart 2  |  Rue du Commerce L-3895 Foetz  |  Luxembourg  |  Europe

 

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